OREGON DEPARTMENT OF ENVIRONMENTAL QUALITY
OREGON TITLE-V OPERATING PERMIT
Northwest Region
2020 SW 4th, Suite 400
Portland, OR 97201
Telephone: (503) 229-5554
Issued in accordance with the provisions of
ORS 468A.040, 468A.300 and based on the land use compatibility findings included in the permit record.
ISSUED TO: INFORMATION RELIED UPON:
Intel Corporation Application No.: 14659
5200 NE Elam Young Parkway Received: 11/15/94
M/S AL4-91
Hillsboro, Oregon 97124
PLANT SITE LOCATION: LAND USE COMPATIBILITY STATEMENT:
3585 SW 198th Avenue From: Washington County Department
Aloha, Oregon 97007 of Land Use & Transportation
Dated: 9/20/91
ISSUED BY DEPARTMENT OF ENVIRONMENTAL QUALITY
_____________________________________________________________________________
Gregory A. Green, Administrator Date
NATURE OF BUSINESS: PRIMARY SIC:
Semiconductor Manufacturing 3674
RESPONSIBLE OFFICIAL: FACILITY CONTACT PERSON
Name: Sunlin Chou Name: Bonnie Gariepy
Title: Vice President and Director of Title: Sr. Environmental Engineer
Components Technology Development Phone: (503) 642-6592 TABLE OF CONTENTS PAGE
List of Abbreviations used in this permit 3
Permitted Activities 4
Emissions Unit and Pollution Control Device Identification 4
Emission Limits and Standards 6
Plant Site Emission Limits 9
Source-Specific Conditions 10
Reasonably Available Control Technology (RACT) Standards
Pollution Prevention and Pre-approved Changes
Aggregate HAPs Emission Limits
Monitoring Requirements 13
Test Methods and Procedures 18
Recordkeeping Requirements 19
Reporting Requirements 20
Non-Applicable Requirements 22
General Conditions 23
Attachment-1 31
LIST OF ABBREVIATIONS USED IN THIS PERMIT
ASTM American Society of Testing and Materials
CFR Code of federal regulations
CO Carbon monoxide
DEQ Oregon Department of Environmental Quality
dscf dry standard cubic foot
EF emission factor
EPA US Environmental Protection Agency
ESP Electrostatic precipitator
EU Emissions unit
FBR Free Board Ratio
FCAA Federal Clean Air Act
gr/dscf grain per dry standard cubic foot
HAP Hazardous Air Pollutant as defined by OAR 340-32-130
HCFC Hydro-chloro-fluoro-carbons
ID Identification number
I&M Inspection and maintenance
MB Material balance
MMBtu Million British thermal units
mvac Motor vehicle air conditioner
NG Natural gas
NOx Oxides of nitrogen
O2 Oxygen
OAR Oregon Administrative Rules
ORS Oregon Revised Statutes
O&M Operation and maintenance
Pb Lead
PCD Pollution control device
PM Particulate matter
PM10 Particulate mater less than 10 microns in size
ppm Part per million
ppmv Part per million by volume
PSEL Plant Site Emission Limit
scf Standard cubic foot
SERP Source Emission Reduction Plan
SO2 Sulfur dioxide
ST Source test
VE Visible emissions
VOC Volatile organic compound
PERMITTED ACTIVITIES
1. Until such time as this permit expires or is modified or revoked, the permittee is allowed to discharge air
contaminants from those processes and activities directly related or associated with the air contaminant
sources in accordance with the requirements, limitations, and conditions in this permit. [OAR 340-28-2100
and 340-28-2200(2)]
2. All Conditions in this permit are federally enforceable and state enforceable except as noted below. [OAR
340-28-2140 and 340-28-2150]
2.a. Conditions 6., 7., 11.b., 15., G21. and associated monitoring requirements are enforceable by the
state only.
2.b. Attachment-1 of this permit provides a cross reference for SIP rules that have been renumbered in the
current Oregon Revised Statutes.
EMISSIONS UNIT (EU) AND POLLUTION CONTROL DEVICE (PCD) IDENTIFICATION
3. The emissions units regulated by this permit are the following [OAR 340-28-2120(3)]:
3.a. Emissions Unit #1 (EU1)
VOC Emissions Unit
Stationary
Source ID
Pollution Control
Device (PCD)
PCD ID.
All activities emitting
Volatile Organic
Compounds (VOCs) at
the Aloha campus
except EU2 and EU3
Boilers.
FAB4
EU1.1
Wet Scrubber
PCD1
FAB5
None
-
D1
EU1.2
Carbon Concentration
Condensation Unit
(CCCU)
PCD26
AL3
EU1.3
None
-
AL4
3.b. Emissions Unit #2 (EU2)
Commercial Boilers
Stationary
Source ID
Capacity
106 btu/hr
FAB4 #1 Boiler
EU2.1
3
FAB4 #2 Boiler
EU2.2
3
FAB4 #3 Boiler
EU2.3
3
FAB5 #1 Boiler
EU2.4
6.5
FAB5 #2 Boiler
EU2.5
6.5
FAB5 #3 Boiler
EU2.6
6.277
FAB5 #4 Boiler
EU2.7
6.277
FAB5 #6 Boiler
EU2.9
1.255
FAB5 #7 Boiler
EU2.10
4.185
FAB5 #8 Boiler
EU2.11
4.185
AL4 #1 Boiler
EU2.12
2.929
AL4 #2 Boiler
EU2.13
2.929
AL4 #3 Boiler
EU2.14
2.929
3.c. Emissions Unit #3 (EU3)
Industrial Boilers
w/ LowNOx Burner
Stationary
Source ID
Capacity
106 btu/hr
D1 #1 Boiler
EU3.1
20.922
D1 #2 Boiler
EU3.2
20.922
D1 #3 Boiler
EU3.3
29.4
D1 #4 Boiler
EU3.4
20.922
D1 #5 Boiler
EU3.5
20.922
4. The VOC Pollution Control Devices (PCD) regulated by this permit are the following [OAR 340-28-
2120(3)]:
Pollution Control
Device
PCD ID
Emission Unit/
Process Controlled
Wet Scrubber
PCD1
EU1.1: VOC emissions
from FAB4 building
Carbon Concentration
Condensation Unit (CCCU)
PCD26
EU1.2: VOC emissions
from D1 building
EMISSION LIMITS AND STANDARDS
The following tables contain summaries of applicable requirements other than the Plant Site Emission Limit
(PSEL), along with the monitoring methods for the emissions units to which those requirements apply.
Table-I. Facility-wide Emission Limits and Standards
Applicable
Requirements
Condition
Number
Pollutant/
Parameter
Limit/
Standard
Monitoring Requirements
Method
Condition
Number
340-21-060(2)
5.
Fugitive/dust
No nuisance
Complaint
Investigation &
Recordkeeping
20.a.
340-30-520
6.
250 microns
ACDP Condition #6.
7.
Odor
ACDP Condition #9.
(340-27-015)
8.
Ozone
Implementation
of SERP
Recordkeeping
20.b.
5. The permittee shall not cause, suffer, allow, or permit any materials to be handled, transported, or stored;
or a building, its appurtenances, or a road to be used, constructed, altered, repaired or demolished; or any
equipment to be operated, without taking reasonable precautions to prevent particulate matter from
becoming airborne. [OAR 340-21-060(2)]
6. Particulate matter which is larger than 250 microns and which may be deposited upon the real property of
another person shall not be emitted. [OAR 340-30-520]
7. The permittee shall not allow the emission of odorous matter or other fugitive emissions so as to create
nuisance conditions off the permittee's property. [04/19/93 ACDP 34-2681, Condition 6]
8. In the event an Air Pollution Alert, Warning, or Emergency Episode is declared in the Portland area by the
Department, the permittee shall take the action appropriate to the episode condition as required by Oregon
Administrative Rules 340, Division 27 "Air Pollution Emergencies." The permittee shall take such action
when the permittee first becomes aware of such a declaration whether through news media, direct contact
with the Department, or from other sources. The Source Emission Reduction Plan (SERP) shall be
available on the source premises for inspection by Department personnel. [04/19/93 ACDP 34-2681,
Condition 9]
Table-II. Emissions Unit Specific Emission Limits and Standards
EU/PCD
ID
Applicable
Requirements
Condition
Number
Pollutant/
Parameter
Limit/
Standard
Monitoring Requirements
Method
Condition
Number
EU2 &
EU3
340-21-015(2)(b)
9.a.
Opacity
20%
VE periodic
monitoring &
Recordkeeping
21.a.
340-21-020(1)(b)
9.b.
PM10/TSP
0.1 gr/scf
PCD1
340-28-620
10.
O&M
O&M
Recordkeeping
21.b.
9. Particulate emissions from each of the EU2 and EU3 boilers shall not exceed the following limits:
9.a. An opacity equal to or greater than twenty percent (20%), excluding uncombined water vapor, for a
period aggregating more than three (3) minutes in any one (1) hour, as monitored in accordance with
Condition 21.a. and measured in accordance with Condition 26. of this permit. [OAR 340-21-
015(2)(b)]
9.b. 0.1 grains per dry standard cubic foot, corrected to 12% carbon dioxide or 50% excess air, as a three
(3) hour average, as monitored in accordance with Condition 21.a. and measured in accordance with
Condition 26. of this permit. [OAR 340-21-020(1)(b)].
10. The permittee shall operate the PCD1 in accordance with the following Operation and Maintenance (O&M)
requirements [OAR 340-28-620]:
10.a. The scrubber water flow rate shall be maintained at a minimum of 125 gpm when the FAB4 air
exhaust rate is 6,500 scfm or greater.
10.b. The scrubber water flow rate shall be maintained at a minimum of 100 gpm when the FAB4 air
exhaust rate is between 5,500 to 6,500 scfm.
10.c. The scrubber water flow rate shall be maintained at a minimum of 75 gpm when the FAB4 is in
operation and the air exhaust rate is less than 5,500 scfm.
Table-III. Emission Limits and Standards Applicable to Insignificant Activities
Applicable
Requirements
Condition
Number
Pollutant/
Parameter
Limit/
Standard
Monitoring Requirements
Method
Condition
Number
340-21-030(2)
11.a.
PM10/TSP
0.1 gr/scf
visible emission
survey
22.
340-30-500
11.b.
Opacity
20%
11. Particulate emissions from any single non-fuel burning and non-fugitive air contaminant source shall not
exceed the following limits:
11.a. 0.1 grains per dry standard cubic foot, as monitored in accordance with Condition 22. and
measured in accordance with Condition 26. of this permit. [OAR 340-21-030(2)]
11.b. an opacity equal to or greater than twenty percent (20%) for a period aggregating more than
thirty (30) seconds in any one (1) hour, as monitored in accordance with Condition 22. and
measured in accordance with Condition 26. of this permit. [OAR 340-30-500(2)]
PLANT SITE EMISSION LIMITS
12. The plant site emissions shall not exceed the following: [OAR 340-28-1000 through 340-28-1060]
12.a. PROCESS (EU1) PSEL
Pollutant
Limit
Units
Monitoring Requirements
VOC
8.0
tons/wk
Chemical Mass Balance, parametric monitoring,
and source test as specified in Condition 24.
190
tons/yr
12.b. COMBUSTION SOURCES (EU2 & EU3) PSEL
Pollutant
Limit
Units
Fuel Usage; Annual and Hourly Units
Monitoring Requirements
PM10
0.8
tons/mo
EU2 max capacity = 53x106 btu/hr
EU3 max capacity = 113x106 btu/hr
Compliance Monitoring with the
monthly limit is specified in
Condition 23.b.
6.4
tons/yr
(2.01 + 7.98 =) 9.99
million therms n.g./yr
Compliance Monitoring with the
annual limit is specified in
Condition 23.a.
SO2
0.3
tons/mo
same as above
same as above
1.3
tons/yr
CO
3.6
tons/mo
same as above
same as above
32.0
tons/yr
NOx
3.2
tons/mo
same as above
same as above
21.6
tons/yr
VOC
0.2
tons/mo
same as above
same as above
1.5
tons/yr
12.b.i. The EU2 and EU3 boilers shall only burn natural gas, and use propane (LPG) as back-up.
13. Emissions from the "Aggregate Insignificant Activities" shall not exceed the following aggregate limits, as
specified in OAR 340-28-110(5). [OAR 340-28-1060(2)]
13.a. Particulate emissions shall not exceed 1.0 ton per year.
13.b. Hazardous Air Pollutants emissions shall not exceed 2.5 tons per year.
SOURCE-SPECIFIC CONDITIONS
REASONABLY AVAILABLE CONTROL TECHNOLOGY (RACT) STANDARDS [OAR 340-22-104 (5)]
14. 14.a. Volatile Organic Compound emissions from EU1, based on a weekly average, shall not exceed
2x10-4 pounds (lbs) per square centimeter (cm2) of wafer processed.
14.b. The permittee shall comply with the specifications outlined below when operating solvent
cleaning stations. Non-VOC solvents as defined in OAR 340-22-100 are exempt from the
requirements of this section.
14.b.i. Each sink must operate with a freeboard ratio of at least 0.7, and have a visible fill line.
14.b.ii. Each sink must be equipped with a cover that is readily opened and closed, and a cover
must be closed during idle periods if the sink contains any free standing solvents.
14.c. Reasonably Available Control Technology (RACT) standards identified in Condition 14.a. and
14.b. shall not become effective until one year from the date of notification by the Department of
EPA's approval to comply with the identified RACT standards.
15. If EPA disapproves the proposed RACT standards identified in Condition 14., the permittee shall provide
the alternative RACT controls for the affected operations according to the schedule outlined below:
15.a. By no later than 90 days after a written notification by the Department, unless otherwise extended
by the Department pursuant to OAR 340-22-104 (6), the permittee shall submit a complete
(alternative) control strategy to the Department for review and approval.
15.b. By no later than 365 days after the date of the Department's written notification of EPA's
approval of the (alternative) control strategy, the permittee shall comply with the approved RACT
standards.
POLLUTION PREVENTION AND PRE-APPROVED CHANGES
16. The permittee shall develop and implement the pollution prevention program in accordance with the
schedule provided and adhere to the conditions specified below [OAR 340-28-610]:
16.a. The pollution prevention program shall be implemented according to the following schedule:
16.a.i. By no later than 60 days after the issuance of this permit, the permittee shall submit to
the Department the proposed pollution prevention program.
16.a.ii. Within 30 days after submittal, the Department will review the proposed program with
respect to the program elements specified in Condition 16.b., and preliminarily
determine adequacy of the information submitted. By no later than 30 days after the
Department approves the proposed program, the permittee shall prepare the pollution
prevention program in detail and submit to the Department.
16.a.iii. The Department will review and comment on the program within 30 days of submittal.
By no later than 15 days after the Department's comment, if any, the permittee shall
either incorporate the Department recommendation or provide justification/explanation
for rejecting the Department recommendation.
16.a.iv. Within 15 days of receipt of the final program submittal, the Department will notify the
permittee of the approval status.
16.a.v. If the Department does not respond within the time line specified, the program submittal
will be deemed approved by the Department.
16.b. The pollution prevention program shall include at minimum the following program elements:
16.b.i. The process to formulate performance goals and objectives to comply with the VOC and
HAP limits through the implementation of pollution prevention.
16.b.ii. Develop a partnership/agreement between the permittee and its materials supplier(s) to
reduce HAP and VOC from their raw materials/products to the extent possible.
16.b.iii. Develop a partnership/agreement between the permittee and its equipment vendor(s) to
reduce HAP and VOC emissions to the extent possible by integrating pollution prevention
into equipment design.
16.b.iv. Formulate data collection necessary for the evaluation of pollution prevention
effectiveness.
16.b.v. Develop a employee training program to promote pollution prevention at the permitted
facility.
16.b.vi. Statement of commitment to pollution prevention at the permitted facility.
16.c. In the event the permittee opts to make a major change in the approved program, the permittee
shall notify the Department in writing at least 30 days prior to making the change. The permittee
shall at minimum demonstrate the need for the modification to the program, and a detailed
description of the modification. The modification procedure shall follow the time-line as
specified in Conditions 16.a.iii through 16.a.v. In the event the permittee makes a minor change
in the approved program, the permittee shall include a description of the change and its
justification in the annual report submitted pursuant to item 16.d. 16.d. Monitoring and Reporting requirements:
16.d.i. Each March 15 following program approval, the permittee shall prepare a detailed
progress report on an annual basis describing accomplishments made under the approved
program.
16.d.ii. The final report prepared on March 15 of the last year of this permit term shall include
a summary of the activities taken during this permit term, and a self evaluation of the
over-all effectiveness of the program.
16.d.iii. All documents and reports must be kept at the permitted facility and shall be made available
to the Department representatives for inspection at the facility.
16.d.iv. Each April 15 following program approval, the permittee shall submit to the Department
an annual executive summary, or the final executive summary in the last year of this
permit term, describing the over-all efforts and definitive results.
17. Pursuant to the requirements of OAR 340-28-2270, the permittee is approved to make physical changes and
changes in method of operation that would increase the maximum capacity of a stationary source to emit
VOC, provided the following conditions are met:
17.a. Such changes are limited to installing new VOC emitting activities and to making physical
changes or changes in the method of operation of existing VOC emitting activities at the
stationary sources comprising EU1.
17.b. No new stationary source shall be added to EU1.
17.c. Increases in maximum capacity to emit of a stationary source at EU1 resulting from changes
approved under this condition shall have been offset by emission reductions at EU1 achieved
through the pollution prevention program outlined in Condition 16. such that the maximum
capacity to emit of EU1 does not exceed the weekly VOC Plant Site Emission Limit (PSEL) for
EU1 specified in Condition 12.a.
17.d. The physical changes and changes in method of operation approved under this condition do not
involve changes to the Pollution Control Devices (PCD) as identified in Condition 4. or cause a
degradation in the performance of any PCD.
17.e. Any new VOC emitting activities and any physical changes or changes in the method of operation
of existing VOC emitting activities must be subject to, and comply with, the RACT requirements
specified in Conditions 14. and 15.
17.f. Any new VOC emitting activities and any physical changes or changes in the method of operation
of existing VOC emitting activities must be subject to, and comply with, the source-specific VOC
Compliance monitoring requirements specified in Condition 24.
17.g. No new applicable requirement is triggered. 17.h. Monitoring and Reporting requirements:
17.h.i. The permittee shall conduct monitoring related to this pre-approval condition in accordance
with the monitoring protocols identified in Condition 25.
17.h.ii. Notice of Completion: In accordance with OAR 340-28-2270(3)(f), the permittee shall
include in the semi-annual report (submitted per Conditions 30. & 31.) a summary of any
pre-approved changes made to EU1 pursuant to this condition during the 6-month period
covered by the report, if the maximum capacity to emit of any stationary source at the end of
the 6-month period covered by the report is greater than the maximum capacity to emit at the
end of the 6-month period covered by the previous semi-annual report, as determined from
monitoring conducted per Condition 25.b.
18. The pollution prevention (#16) and pre-approval (#17) conditions as outlined above are a one term
experiment which will expire at the completion of the first term of this Oregon Title-V Operating Permit
34-2681, unless otherwise agreed upon by mutual consent to continue, which will be decided at the time of
permit renewal.
AGGREGATE HAPs EMISSION LIMITS
19. The permittee shall emit organic (VOC) and inorganic (non-VOC) hazardous air pollutants (HAPs),
on a total aggregate plant site basis, within the following annual limits in order to retain the area
source status for HAPs:
19.a. Aggregate organic HAPs emissions, based on a twelve month rolling average, shall be less than
10 tons per year.
19.b. Aggregate inorganic HAPs emissions, based on a twelve month rolling average, shall be less than
10 tons per year.
MONITORING REQUIREMENTS
20. The permittee shall conduct monitoring related to the facility-wide emissions limits and standards
established in Conditions 5. through 8., and the aggregate insignificant limits specified in Condition 13., in
accordance with the following procedures and frequencies:
20.a. The permittee shall maintain a log recording all written complaints or complaints received via
telephone or in person by the responsible official or a designated appointee that specifically refer
to a complaint of odor/visible nuisance from the permitted facility. Said log shall also record
permittee's actions to investigate, make a determination as to the validity of the complaint, and
resolve the problem within two working days or within such longer time (not to exceed 14 days)
as is reasonably necessary to resolve the problem that led to the complaint. 20.b. The permittee shall maintain a log summarizing actions taken during an applicable air pollution
episode, pursuant to Condition 8.
20.c. The minimum monitoring requirements for emission limits established in Condition 13. for
"aggregate insignificant activities" are as follow:
20.c.i. Once during each permit term, the emissions from the activities included under the aggregate
insignificant emissions limits shall be estimated in accordance with OAR 340-28-
2120(3)(c)(E). The emissions estimation may coincide with the permit renewal application.
20.c.ii. Once during each semi-annual reporting period of the permit, the permittee shall inspect and
make a determination that the activities included under the aggregate insignificant emissions
limits have not been modified in such a manner that would increase the emissions above the
aggregate insignificant emissions limit.
20.c.iii. The permittee shall maintain a log for recording the results of the inspections required by
condition 20.c.ii.
21. The permittee shall conduct monitoring related to the EU-specific emission limits and standards established
in Conditions 9. and 10. in accordance with the following procedures and frequencies:
21.a. The minimum monitoring requirements for Condition 9. are specified as follow:
21.a.i. As long as the boilers burn natural gas (or propane/LPG as a backup) only under the
approved operating scenario, the permittee is assumed to be in compliance with the 20%
visible standard (9.a.).
21.a.ii. As long as the boilers burn natural gas (or propane/LPG as a backup) only under the
approved operating scenario, the permittee is assumed to be in compliance with the 0.1 grain
loading standard (9.b.).
21.a.iii. The permittee shall monitor the type(s) of fuel used in EU2 and EU3 boilers as required in
Condition 23.c. The permittee shall notify the Department in writing and get an approval
prior to using fuels other than natural gas (or propane/LPG as a backup) in the EU2/EU3
boilers, at which time the permittee may become subject to the construction/operation
modifications requirements as specified in OAR 340-28-2270.
21.b. The minimum monitoring requirements for the "Operation and Maintenance" protocols of
Condition 10. are specified as follow:
21.b.i. Each time the scrubber water pumping rate is changed from one compliance level to
another, as specified in Conditions 10.a through 10.c.; the permittee shall record the
water flow rate and the corresponding pressure drop across the packing, and the date of
the change.
21.b.ii. Each time the air flow rate is changed from one compliance level to another, as
specified in Conditions 10.a through 10.c.; the permittee shall record the FAB4 air
exhaust rate to PCD1, and the date of the change.
21.b.iii. The permittee shall keep a log of any maintenance and/or service performed.
22. The permittee shall conduct monitoring related to the Emissions limits and standards applicable to
Insignificant Activities established in Condition 11. in accordance with the following procedures and
frequencies:
22.a. Once during each semi-annual reporting period, which may coincide with the monitoring
conducted per Condition 20.c.ii., the permittee shall inspect and determine whether the
categorically insignificant activities and the activities included in the aggregate insignificant
emissions are in compliance with all applicable requirements, condition 11. The permittee shall
record in a log the results of this inspection.
23. The permittee shall determine compliance with the Combustion sources PSELs established in Condition
12.b. in accordance with the formula and procedures specified:
E = EF x P/2,000 where;
E = pollutant emissions, ton/yr
EF = PSEL Emission Factors, see Table below (& see Attachments)
P = annual natural gas usage (106 acf)
23.a. For each pollutant, the actual annual natural gas usage is multiplied by the EF below to
determine annual emissions:
Emission Factors (lbs/106 acf)
Pollutant
PM10
SO2
NOx
CO
VOC
EU2 EF
12
2.6
100
21
3.8
EU3 EF
13.7
2.6
31.5
78.8
2.8
23.b. For each pollutant, the actual monthly natural gas usage is multiplied by the EF below to
determine monthly emissions:
Emission Factors (lbs/106 acf)
Pollutant
PM10
SO2
NOx
CO
VOC
EU2 EF
12
3.8
100
21
3.8
EU3 EF
13.7
3.8
31.5
78.8
2.8
23.c. Monitor and record the quantity and type of fuel(s) used on a monthly basis.
24. The permittee shall determine compliance with the "VOC PSELs" established in Condition 12.a.; "RACT
standards" established in Conditions 14. and 15.; and the "Aggregate HAP limits" established in Condition
19. in accordance with the following chemical mass balance procedures. The minimum monitoring
frequency specified below is also the required interval between two consecutive monitoring periods.
Minimum
Parameter Monitoring Frequency
24.a. Quantity of VOCs used. 2 months
24.b. Quantity of hazardous and non- 2 months
hazardous VOC waste shipped off site and
representative VOC content.
24.c. Quantity (Q1) of VOCs controlled by PCD1; 2 months
plus quantity (Q2) of VOCs recovered by PCD26.
Note: A portion of Q2 that is returned to the process need not be monitored separately. Only a portion of
Q2 that is wasted needs to be included in item b.
24.d. A total aggregate HAP emission; monthly
separate VOC HAPs from non-VOC HAPs
24.e. Total "cm2" of wafer processed Weekly
24.f. The Bi-monthly emission factor (EF) 2 months
derived from items a, b, c, and the sum of e.
EF = (a - b - c) / bi (e) Minimum
Parameter Monitoring Frequency
24.g. The weekly VOC emission from Weekly
the weekly production e. and the
most recent EF as determined in f.
Weekly emission = EF * (e)
24.h. Weekly RACT compliance Weekly
determination.
" lbs VOC / cm2 Wafer " = g / e
24.i. Free Board Ratio (FBR) None required for automatic control. For
manually operated stations, monitor and
record on a monthly basis.
24.j. The permittee is not subject to the monitoring conditions 24.h. and 24.i. associated with the
RACT standards of Condition 14., until the RACT standards become effective as outlined in
Condition 14.c. The RACT monitoring protocol may be revised if alternative RACT is
established pursuant to Condition 15.
24.k. Source testing
24.k.i. Within 3 months of startup of PCD1, the permittee shall verify the control efficiency (%) of
PCD1 utilized in the VOC emissions calculations (see item c. above). A second source test
shall be conducted in the third year of the permit term.
24.k.ii. Source tests on PCD1 shall be conducted in accordance with the Department's Source
Sampling Manual, unless an alternative (DEQ/EPA approved) method is approved in writing
by the Department.
25. The permittee shall conduct monitoring related to the pre-approval conditions established in Condition 17.
in accordance with the following procedures and frequencies:
25.a. On a weekly basis, the permittee shall determine the maximum capacity to emit of each stationary
source at EU1 by using the latest EF derived from Condition 24.f., and compare the results to
the weekly PSEL established in Condition 12.a.:
"Maximum capacity to emit" = EF * maximum wafer production capacity (cm2/week)
25.b. At the end of each 6-month reporting period, which may coincide with the monitoring conducted
per Condition 20.c.i. or 22., the permittee shall inspect and determine whether each pre-approved
change made to the EU1 stationary sources complies with the criteria set forth in Conditions
17.a., 17.b., and 17.d. through 17.g.
25.c. At the end of each 6-month reporting period, the permittee shall determine the maximum capacity
to emit of each stationary sources at EU1. The permittee shall then combine the "Maximum
capacity to emit" of all stationary sources at EU1, and compare the sum (EU1's maximum
capacity) to the sum determined as of the end of the previous six month period. As specified in
Condition 17.h.ii., if the current maximum capacity of EU1 is greater than the maximum
capacity of EU1 as of the end of the previous six month period, the permittee shall submit a
Notice of Completion and include at a minimum the following information:
25.c.i. A summary description of the new and/or modified activities that caused the increase in
maximum capacity to emit of EU1.
25.c.ii. Date of completion and the date new and/or modified activities commenced or will begin.
25.c.iii. The net increase in capacity of EU1 due to the new and/or modified activities.
25.c.iv. A brief summary describing how the increases in the capacity of EU1 have been offset by
the pollution prevention program outlined in Condition 16. such that the weekly VOC PSEL
for EU1 specified in Condition 12.a. is not exceeded. A detailed report shall follow in
accordance with the reporting requirements outlined in Condition 16.d.
TEST METHODS AND PROCEDURES [OAR 340-28-2130(1)]
26. If source testing is conducted in addition to the monitoring specified in this permit, the permittee shall use
the following test methods and averaging times to measure the pollutant emissions for the applicable
requirements referenced in the table:
Applicable
requirement
Condition
Test Method
Averaging time
Special conditions:
11.a.
ODEQ Methods 5,
7, or 8
average of three one-
hour test runs
ODEQ Method 8 is for sources with exhaust gases at essentially
ambient conditions (e.g. material handling cyclones); ODEQ
Method 7 is for direct contact combustion or other heat sources
(e.g. particle and veneer dryers); ODEQ Method 5 is for indirect
contact fuel burning equipment (e.g. boilers) and any other
source.
Applicable
requirement
Condition
Test Method
Averaging time
Special conditions:
9.a.
11.b.
EPA Method 9
aggregate of thirty
seconds in any 60
minute period
The test duration may be less than 60 minutes if a violation of the
standard is documented before the full 60 minute observation
period is completed.
9.b.
ODEQ Method 5
average of three test
runs
The sample time for each test run shall be no less than one hour
(31.8 dscf) and no longer than eight hours.
26.a. All testing shall be conducted in accordance with the Department's Source Sampling Manual
unless otherwise specified in the special conditions column of the table above.
RECORDKEEPING REQUIREMENTS [OAR 340-28-2130(3)(b)]
27. The permittee shall maintain the following general records of required monitoring information which
include the following:
27.a. the date, place, and time of sampling/testing or measurements;
27.b. the date(s) analyses were performed;
27.c. the company or entity that performed the analyses;
27.d. the analytical techniques or methods used;
27.e. the results of such analyses;
27.f. the operating conditions as existing at the time of sampling or measurement; and
27.g. the records of quality assurance for continuous monitoring systems, including but not limited to
quality control activities, audits, calibrations drifts.
28. The permittee shall maintain the following specific records of required monitoring information which
include the following:
28.a. Complaint log;
28.b. Operation & Maintenance records;
28.c. Inspection/survey records;
28.d. Quantities and types of fuels used on a monthly basis;
28.e. Weekly productions in total "cm2" of wafer start;
28.f. Records of chemicals used by type, quantity, and VOC/HAP contents;
28.g. Records of waste shipment and analysis results;
28.h. Continuous monitoring charts, if any;
28.i. Records of all calculated PSEL and RACT emissions; and
28.j. Records resulting from monitoring related to Pollution Prevention and Pre-approval Conditions.
29. The permittee shall retain records of all required monitoring data and support information for a period of at
least five (5) years from the date of the monitoring sample, measurement, report, or application. Support
information includes all calibration and maintenance records and all original strip-chart recordings for
continuous monitoring instrumentation, and copies of all reports required by the permit. All existing
records required by the previous Air Contaminant Discharge Permit shall also be retained for five (5)
years.
REPORTING REQUIREMENTS [OAR 340-28-2130(3)(c) and 340-28-2160]
30. The permittee shall submit four (4) copies of the semi-annual monitoring report, using Department
approved forms, by July 30, unless otherwise approved in writing by the Department. One copy of the
report shall be submitted to the Air Quality Division, two copies to the regional office, and one copy to the
EPA. The semi-annual monitoring report shall include the semi-annual compliance certification.
31. The permittee shall submit four (4) copies of the annual monitoring report, using Department approved
forms, by February 15, unless otherwise approved in writing by the Department. One copy of the report
shall be submitted to the Air Quality Division, two copies to the regional office, and one copy to the EPA.
32. The annual monitoring report shall consist of:
32.a. The emission fee report.
32.b. The emission statement. [OAR 340-28-1520]
32.c. The excess emissions upset log. [OAR 340-28-1440]
32.d. The second semi-annual compliance certification. [OAR 340-28-2160]
Source-specific Reporting Requirements
32.e. Quantity of natural gas burned on a monthly and annual basis for EU2 and EU3. Also certify
that no other fuels than natural gas have been used.
32.f. Tabulate the bi-monthly VOC emissions based on actual solvent monitoring as determined from
data collected per Condition 24: a, b, and c.
32.g. Tabulate the bi-monthly VOC emissions based on EF and production as determined from the (2
months) sum of weekly emissions (24.g). Also report the bi-monthly EFs (lbs VOC/cm2 wafer)
used for each bi-monthly monitoring period. Note that the bi-monthly sum of weekly emissions
based on EF does not have to equal the actual emission determined from the actual solvent
monitoring, i.e., results obtained by item 32.g. do not have to equal results obtained by item
32.h.
32.h. A summary of maximum weekly VOC emissions noted during each (2 month) monitoring period
and corresponding dates (weeks) from Condition 24.g. Report all exceedances of the weekly
PSEL.
32.i. A summary of maximum weekly RACT emissions noted during each 2 month monitoring period
and corresponding dates (weeks) from Condition 24.h., once the RACT standard becomes
effective. Report all exceedances of the source-specific RACT standard of 2x10-4 lbs VOCs/cm2
wafer processed.
32.j. Report all exceedances of the RACT Free Board Ratio limit (Condition 14.b) as determined from
Condition 24.i., once the RACT standard becomes effective.
32.k. A summary of the rolling HAP emissions as determined from Condition 24.d.
Addresses of regulatory agencies:
DEQ-Northwest Region DEQ-Air Quality Division Air Compliance Division
2020 SW 4th, Suite 400 811 SW Sixth Ave. US EPA
Portland, OR 97201 Portland, OR 97204 Mail Stop AT-084
Telephone (503) 229-5554 Telephone (503) 229-5359 Seattle, WA 98101
NON-APPLICABLE REQUIREMENTS
33. Air Quality Oregon Administrative Rules (OAR) and/or federal rules (40 CFR) currently determined not
applicable to the permittee are listed below [OAR 340-28-2190 (1)(b)]:
33.a. The following OAR and 40 CFR are not applicable because the source is not in the source
category cited in the rules:
340-21-027, 210 to 245.
340-22-010 to 025, 106, 110 to 175, 190 to 640; except 340-22-405 to 410.
340- Divisions 23; Division 24 except 340-24-005, 035 to 040; Division 25 except 340-25-505, 510,
515, 525.
340-28-500 to 520, 800 to 820, 2170, 2680.
340-30-420, 460, 500, 530.
340-31-010 to 055.
340-32-220, 250, 4500.
40 CFR; Parts 55, 60, 61 except Subpart M, 63, 72 to 73, 75.
33.b. The following OARs are not applicable because the source does not have specific emissions units
cited in the rules:
340-21-025.
340-22-180, 183, 186.
33.c. The following OARs are not applicable because the source is outside the special control, non-
attainment areas or county cited in the rules.
340-27-025.
340-30-012 to 230, 600 to 620.
33.d. The following OARs are not applicable because the method/procedure is not used by the facility.
340-28-1040.
33.e. The following OARs applied in the past and the fees have been paid.
340-28-2400 to 2550, 2570. GENERAL CONDITIONS
G1. General Provision
Terms not otherwise defined in the permit shall have the meaning assigned to such terms in the
referenced regulation.
G2. Reference materials
Where referenced in this permit, the version of the following materials are effective as of the dates
noted unless otherwise specified in the permit:
a. Source Sampling Manual; January 23, 1992 - State Implementation Plan Volume 3, Appendix A4;
b. Continuous Monitoring Manual; January 23, 1992 - State Implementation Plan Volume 3,
Appendix A6; and
c. All state and federal regulations as in effect on the date of issuance of this permit.
G3. Compliance [OAR 340-28-2120(3)(n)(C), 340-28-2130(6), and 340-28-2160(4)]
a. The permittee shall comply with all conditions of the federal operating permit. Any permit
condition noncompliance constitutes a violation of the Federal Clean Air Act and/or state rules and
is grounds for enforcement action; for permit termination, revocation and reissuance, or
modification; or for denial of a permit renewal application. Any noncompliance with a permit
condition specifically designated as enforceable only by the state constitutes a violation of state
rules only and is grounds for enforcement action; for permit termination, revocation and
reissuance, or modification; or for denial of a permit renewal application.
b. Any schedule of compliance for applicable requirements with which the source is not in
compliance at the time of permit issuance shall be supplemental to, and shall not sanction
noncompliance with the applicable requirements on which it is based.
c. For applicable requirements that will become effective during the permit term, the source shall
meet such requirements on a timely basis unless a more detailed schedule is expressly required by
the applicable requirement.
G4. Compliance Monitoring and Enforcement [OAR 340-28-300, 340-28-1100, 340-28-1120, 340-28-1130,
340-28-1140, 340-28-2130(3), 340-28-2160, 340-32-270]
a. For the purpose of submitting semi-annual compliance certification reports, the permittee shall use,
at a minimum, the information obtained from the monitoring requirements of this permit. The
permittee shall not knowingly falsify or render inaccurate any monitoring device or method
required to be maintained or followed by the permit.
b. The information obtained from the monitoring required by this permit can be used directly for
enforcement.
G5. Certification [OAR 340-28-300, 340-28-2120(5) and 340-28-2160(2)]
Any document submitted to the Department pursuant to this permit shall contain certification by a
responsible official of truth, accuracy and completeness. All certifications shall state that based on
information and belief formed after reasonable inquiry, the statements and information in the document
are true, accurate, and, complete. The permittee shall promptly, upon discovery, report to the
Department a material error or omission in these records, reports, plans, or other documents.
G6. Excess Emissions Reporting [OAR 340-28-1400 through 340-28-1460]
a. The permittee shall report all excess emissions in accordance with OAR 340-28-1400 through 340-
28-1460. In summary, the permittee shall immediately (i.e., as soon as possible but in no case
more than one hour after the beginning of the excess emission period) notify the Department by
telephone or in person of any excess emission, other than pre-approved startup, shutdown, or
scheduled maintenance. Notification shall, to the extent reasonably ascertainable at the time of
notification, include the source name, nature of the emissions problem, name of the person making
the report, name and telephone number of the contact person for further information, date and time
of the onset of the upset condition, whether or not the incident was planned, the cause of the
excess emission (e.g., startup, shutdown, maintenance, breakdown, or other), equipment involved
in the upset, estimated type and quantity of excess emissions, estimated time of return to normal
operations, efforts made to minimize emissions, and a description of remedial actions to be taken.
Follow-up reporting shall be made in accordance with Department direction and OAR 340-28-
1430(2) and 340-28-1440.
b. Notification shall be made to the appropriate regional office. Current Departmental telephone
numbers are:
Portland 229-5554 Medford 776-6010
Bend 388-6146 Pendleton 276-4063
Salem 378-8240
c. In the event of any excess emissions which are of a nature that could endanger public health and
occur during nonbusiness hours, weekends, or holidays, the permittee shall immediately notify the
Department by calling the Oregon Accident Response System (OARS). The current number is 1-
800-452-0311.
d. If startups, shutdowns, or scheduled maintenance may result in excess emissions, the permittee
shall submit startup, shutdown, or scheduled maintenance procedures used to minimize excess
emissions to the Department for prior authorization, as required in OAR 340-28-1410 and 340-28-
1420. New or modified procedures shall be received by the Department in writing at least 72
hours prior to the first occurrence of the excess emission event. The permittee shall abide by the
approved procedures and have a copy available at all times. e. The permittee shall notify the Department of planned startup/shutdown or scheduled maintenance
events only if required by permit condition or if the source is located in a nonattainment area for a
pollutant which may be emitted in excess of applicable standards.
G7. Permit Deviation Reporting [OAR 340-28-2130(3)(c)(B)]
The permittee shall promptly report, by telephone or in person, any deviations from permit
requirements that do not cause excess emissions, including those attributable to upset conditions, as
defined in the permit, the probable cause of such deviations, and any corrective actions or preventative
measures taken. Deviations are instances when any permit condition is violated. "Prompt" is defined
as within seven (7) days of the deviation.
G8. Open Burning [OAR Chapter 340, Division 23]
The permittee is prohibited from conducting open burning, except as may be allowed by OAR 340-23-
025 through 340-23-115.
G9. Asbestos [40 CFR Part 61, Subpart M (federally enforceable), OAR 340-32-5600 through 340-32-5650
and OAR Chapter 340, Division 33 (state-only enforceable)]
The permittee shall comply with OAR 340-32-5600 through 340-32-5650, OAR Chapter 340 Division
33, and 40 CFR Part 61, Subpart M when conducting any renovation or demolition activities at the
facility.
G10. Stratospheric Ozone and Climate Protection [40 CFR 82 Subpart F]
The permittee shall comply with the standards for recycling and emissions reduction pursuant to 40
CFR Part 82, Subpart F, Recycling and Emissions Reduction.
G11. Permit Shield [OAR 340-28-2190]
a. Compliance with this permit shall be deemed compliance with all applicable requirements as of the
date of permit issuance provided that:
i. such applicable requirements are specifically identified in the permit, and
ii. such applicable requirements are specifically identified in the "Non-Applicable Requirements"
section of this permit.
b. Nothing in this rule or in any federal operating permit shall alter or affect the following:
i. the provisions of ORS 468.115 (enforcement in cases of emergency) and ORS 468.035
(function of department);
ii. the liability of an owner or operator of a source for any violation of applicable requirements
prior to or at the time of permit issuance;
iii. the applicable requirements of the national acid rain program, consistent with section 408(a)
of the FCAA; or
iv. the ability of the Department to obtain information from a source pursuant to ORS 468.095
(investigatory authority, entry on premises, status of records).
c. Sources are not shielded from applicable requirements that are enacted during the permit term,
unless such applicable requirements are incorporated into the permit by administrative amendment,
as provided in OAR 340-28-2230(1)(h), or significant permit modification.
G12. Inspection and Entry [OAR 340-28-2160(3)]
Upon presentation of credentials and other documents as may be required by law, the permittee shall
allow the Department of Environmental Quality, or an authorized representative (including an
authorized contractor acting as a representative of the EPA Administrator), to perform the following:
a. enter upon the permittee's premises where an Oregon Title V operating permit program source is
located or emissions-related activity is conducted, or where records must be kept under the
conditions of the permit;
b. have access to and copy, at reasonable times, any records that must be kept under conditions of
the permit;
c. inspect, at reasonable times, any facilities, equipment (including monitoring and air pollution
control equipment), practices, or operations regulated or required under the permit; and
d. as authorized by the FCAA or state rules, sample or monitor, at reasonable times, substances or
parameters, for the purposes of assuring compliance with the permit or applicable requirements.
G13. Fee Payment [OAR 340-28-2560, and 340-28-2580 through 340-28-2740]
The permittee shall pay an annual base fee and an annual emission fee for all regulated air pollutants
except for carbon monoxide, any class I or class II substance subject to a standard promulgated under
or established by Title VI of the Federal Clean Air Act, or any pollutant that is a regulated air pollutant
solely because it is subject to a standard or regulation under section 112(r) of the Federal Clean Air
Act. The permittee shall submit payment to the Department of Environmental Quality, Business Office,
811 SW 6th Avenue, Portland, OR 97204, within 30 days of the date the Department mails the fee
invoice or August 1 of the year following the calendar year for which emission fees are paid, whichever
is later. Disputes shall be submitted in writing to the Department of Environmental Quality. Payment
shall be made regardless of the dispute. User-based fees shall be charged for specific activities (e.g.,
computer modeling review, ambient monitoring review, etc.) requested by the permittee. G14. Off-Permit Changes to the Source [OAR 340-28-2220(2)]
a. The permittee shall monitor for, and record, any off-permit change to the source that:
i. is not addressed or prohibited by the permit;
ii. is not a Title I modification;
iii. is not subject to any requirements under Title IV of the FCAA;
iv. meets all applicable requirements;
v. does not violate any existing permit term or condition; and
vi. may result in emissions of regulated air pollutants subject to an applicable requirement but
not otherwise regulated under this permit or may result in insignificant changes as defined in
OAR 340-28-110.
b. A contemporaneous notification, as required in OAR 340-28-2220(2)(b), shall be submitted to the
Department and the EPA.
c. The permittee shall keep a record describing off-permit changes made at the facility that result in
emissions of a regulated air pollutant subject to an applicable requirement, but not otherwise
regulated under the permit, and the emissions resulting from those off-permit changes.
d. The permit shield of condition G11 shall not extend to off-permit changes.
G15. Section 502(b)(10) Changes to the Source [OAR 340-28-2220(3)]
a. The permittee shall monitor for, and record, any section 502(b)(10) change to the source, which is
defined as a change that would contravene an express permit term but would not:
i. violate an applicable requirement;
ii. contravene a federally enforceable permit term or condition that is a monitoring,
recordkeeping, reporting, or compliance certification requirement; or
iii. be a Title I modification.
b. A minimum 7-day advance notification shall be submitted to the Department and the EPA in
accordance with OAR 340-28-2220(3)(b).
c. The permit shield of condition G11 shall not extend to section 502(b)(10) changes.
G16. Administrative Amendment [OAR 340-28-2230]
Administrative amendments to this permit shall be requested and granted in accordance with OAR 340-
28-2230. The permittee shall promptly submit an application for the following types of administrative
amendments upon becoming aware of the need for one, but no later than 60 days of such event:
a. legal change of the registered name of the company with the Corporations Division of the State of
Oregon, or b. sale or exchange of the activity or facility.
G17. Minor Permit Modification [OAR 340-28-2250]
The permittee shall submit an application for a minor permit modification in accordance with OAR 340-
28-2250.
G18. Significant Permit Modification [OAR 340-28-2260]
The permittee shall submit an application for a significant permit modification in accordance with OAR
340-28-2260.
G19. Construction/Operation Modification [OAR 340-28-2270]
No permittee shall construct or make modifications required to be reviewed under OAR 340-28-2270,
the construction/operation modification rule, without receiving a Notice of Approval in accordance with
OAR 340-28-2270. The permittee should allow 60 days for Department review of applications for a
construction/operation modification if public notice is not required, or 180 days if public notice is
required.
G20. New Source Review Modification [OAR 340-28-1900]
No permittee shall construct or make modifications required to be reviewed under New Source Review
(OAR 340-28-1900(1)) without receiving an Air Contaminant Discharge Permit (ACDP) (OAR 340-28-
1700). The permittee should allow 180 days for Department review of an ACDP application for New
Source Review.
G21. Hazardous Air Pollutant Modification for Non-major HAP Sources [OAR 340-32-230 (state-only
enforceable)]
No permittee shall make a physical change in or change in the method of operation of a non-major
HAP source that results in an increase in the potential to emit so that the major source threshold (i.e.,
10 tons of an individual HAP or 25 tons of aggregate HAPs) is exceeded, without first obtaining a
Notice of Approval in accordance with OAR 340-28-2270. The permittee should allow 180 days for
Department review of applications for construction/operation modifications and issuance of a Notice of
Approval.
G22. Need to Halt or Reduce Activity Not a Defense [OAR 340-28-2130(6)(b)]
It shall not be a defense for a permittee in an enforcement action that it would have been necessary to
halt or reduce the permitted activity in order to maintain compliance with the conditions of this permit. G23. Duty to Provide Information [OAR 340-28-2130(6)(e) and OAR 340-28-300]
The permittee shall furnish to the Department, within a reasonable time, any information that the
Department may request in writing to determine whether cause exists for modifying, revoking and
reissuing, or terminating the permit, or to determine compliance with the permit. Upon request, the
permittee shall also furnish to the Department copies of records required to be retained by the permit.
G24. Reopening for Cause [OAR 340-28-2130(6)(c) and 340-28-2280]
a. The permit may be modified, revoked, reopened and reissued, or terminated for cause as
determined by the Department.
b. The filing of a request by the permittee for a permit modification, revocation and reissuance, or
termination, or of a notification of planned changes or anticipated noncompliance does not stay any
permit condition.
c. A permit shall be reopened and revised under any of the circumstances listed in OAR 340-28-
2280(1)(a).
d. Proceedings to reopen and reissue a permit shall follow the same procedures as apply to initial
permit issuance and shall affect only those parts of the permit for which cause to reopen exists.
G25. Severability Clause [OAR 340-28-2130(5)]
Upon any administrative or judicial challenge, all the emission limits, specific and general conditions,
monitoring, recordkeeping, and reporting requirements of this permit, except those being challenged,
remain valid and must be complied with.
G26. Permit Renewal and Expiration [OAR 340-28-2120(1)(a)(D) and 340-28-2210]
a. This permit shall expire at the end of its term. Permit expiration terminates the permittee's right
to operate unless a timely and complete renewal application is submitted as described below.
b. Applications for renewal shall be submitted at least 12 months before the expiration of this permit,
unless the Department requests an earlier submittal. If more than 12 months is required to process
a permit renewal application, the Department shall provide no less than six (6) months for the
owner or operator to prepare an application. Provided the permittee submits a timely and
complete renewal application, this permit shall remain in effect until final action has been taken on
the renewal application to issue or deny the permit.
G27. Permit Transference [OAR 340-28-2230(1)(d)]
The permit is not transferrable to any person except as provided in OAR 340-28-2230(1)(d).
G28. Property Rights [OAR 340-28-110(9)(c) and 340-28-2130(6)(d)]
The permit does not convey any property rights in either real or personal property, or any exclusive
privileges, nor does it authorize any injury to private property or any invasion of personal rights, nor
any infringement of federal, state, or local laws or regulations, except as provided in OAR 340-28-
2190.
G29. Permit Availability [OAR 340-28-110(9)(c) and 340-28-2200(2)]
The permittee shall have available at the facility at all times a copy of the Oregon Title V Operating
Permit and shall provide a copy of the permit to the Department or an authorized representative upon
request.
ALL INQUIRIES SHOULD BE DIRECTED TO:
Northwest Region
2020 S.W. 4th Avenue, #400
Portland, OR 97201-5884
Telephone: (503) 229-5263
P342681
ATTACHMENT-1
The following Oregon Administrative Rules have been renumbered from Division 20 to Division 28. The
Division 20 rules are enforceable by the EPA until the proposed State Implementation Plan (SIP) revisions have
been approved by the EPA. At that time, the Division 28 rules will be enforceable by the EPA. Currently, the
Division 28 rules are enforceable by the Department only.
State-only Enforceable Rules
340-28-500
340-28-510
340-28-520
340-28-800
340-28-810
340-28-820
340-28-1010
340-28-1020
340-28-1030
340-28-1040
340-28-1100
340-28-1120
340-28-1130
340-28-1140
340-28-1400
340-28-1410
340-28-1420
340-28-1430
340-28-1440
340-28-1700
340-28-1900 Federally Enforceable Rules
340-20-005
340-20-010
340-20-015
340-20-020
340-20-025
340-20-030
340-20-301
340-20-310
340-20-315
340-20-320
340-20-035
340-20-040
340-20-045
340-20-046
340-20-350
340-20-360
340-20-365
340-20-370
340-20-375
340-20-140
340-20-220
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